1.

Conference Proceedings
Conference Proceedings
1. Thermal effect study in excimer laser ablation of polymide
Gu, J. ; Tay, E. ; Lim, P.K. ; Lim, P.
Pub. info.: Photonic systems and applications : 27-30 November 2001, Singapore.  pp.132-137,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4595
2.

Conference Proceedings
Conference Proceedings
2. Nd:YAG laser cleaning of ablation debris from　excimer-laser ablated polymide
Gu, J. ; Low, J. ; Lim, P.K. ; Lim, P.
Pub. info.: Photonic systems and applications : 27-30 November 2001, Singapore.  pp.293-300,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4595
3.

Conference Proceedings
Conference Proceedings
3. Laser-Assisted Wes Etching of Silicon
Lim, P. ; Brock, J.R. ; Trachtenberg, I.
Pub. info.: AIChE ANNUAL MEETING, CHICAGO, IL. -NOVEMBER 11-16, 1990.  1990.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1990
4.

Conference Proceedings
Conference Proceedings
4. Laser-Assisted Liquid Film Etching
Lim, P. ; Brock, J.R. ; Trachtenberg, I.
Pub. info.: Proceedings of the second International Symposium on Electrochemical Processing of Tailored Materials.  pp.170-174,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-12
5.

Conference Proceedings
Conference Proceedings
5. Mask challenges and capability development for the 65-nm device technology node: the first status report
Kim, W.D. ; Aquino, C.M. ; Eickhoff, M.D. ; Lim, P. ; Fukuhara, N. ; Jessen, S.W. ; Kikuchi, Y. ; Tanzawa, J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.859-870,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256