1.

Conference Proceedings
Conference Proceedings
1. Measurement of all the elastic, piezoelectric, and dielectric properties of PMN-PT single crystals
Lee, S.-H. ; Lee, S.-S. ; Roh, Y.R. ; Lee, H.-Y. ; Han, J.-H.
Pub. info.: Smart structures and materials 2003 : Active materials : Behavior and mechanics : 3-6 March 2003, San Diego, California, USA.  pp.505-512,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5053
2.

Conference Proceedings
Conference Proceedings
2. 15 A New Lithium Based Counter Electrochromic Material for Fast Optical Response
Lee, S.-H. ; Lee, B.-I. ; Joo, S.-K.
Pub. info.: Proceedings of the Third Symposium on Electrochromic Materials.  pp.191-205,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-24
3.

Conference Proceedings
Conference Proceedings
3. Improvement in light-output power of InGaN/GaN light-emitting diodes by p-GaN surface modification using self-assembled metal clusters
Kang, E.-J. ; Huh, C. ; Lee, S.-H. ; Jung, J.-J. ; Lee, S.-J. ; Park, S.-J.
Pub. info.: Third international conference on solid state lighting : 5-7 August 2003, San Diego, California, USA.  pp.41-53,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5187
4.

Conference Proceedings
Conference Proceedings
4. Very Light Nitridation Of Thin Gate Oxide In Low Pressure N20 Ambients
Joo, M.-S. ; Lee, S.-H. ; Cho, B.-J. ; Kim, J.-C. ; Choi, S.-H.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.458-465,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
5.

Conference Proceedings
Conference Proceedings
5. Experimental study of instantaneous probabilistic energy control for seismically excited structures
Hwang, J.-S. ; Min, K.-W. ; Lee, S.-H. ; Kim, H. ; Kim, H.-S.
Pub. info.: Smart structures and materials 2004 : sensors and smart structures technologies for civil, mechanical, and aerospace systems : 15-18 March 2004, San Diego, California, USA.  pp.566-577,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5391
6.

Conference Proceedings
Conference Proceedings
6. Calculation of overpotential of co-fired SOFC from the AC impedance measurements
Han, Y.-S. ; Han, Y.-H. ; Song, W.-S. ; Yun, J.-M. ; Lee, S.-H. ; Seo, U.-Y
Pub. info.: Proceedings of the Fifth International Symposium on Solid Oxide Fuel Cells (SOFC-V).  pp.575-584,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-40
7.

Conference Proceedings
Conference Proceedings
7. New Transparent Li Ion Conducting Solid Electrolyte for All Solid State Electrochromic Devices
Lee, S.-H. ; Hwang, K.-H. ; Joo, S.-K.
Pub. info.: Proceedings of the Symposium on Electrochromic Materials II.  pp.290-302,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-2
8.

Conference Proceedings
Conference Proceedings
8. EFFECTS OF POST ETCH TREATMENTS ON CONTAMINATED SILICON SURFACE DUE TO CHF3/C2F6 REACTIVE ION ETCHING
Park, H.-H. ; Kwon, K.-H. ; Lee, S.-H. ; Nahm, S. ; Lee, J.-W. ; Koak, B.-H. ; Suh, K.-S. ; Kwon, O.-J. ; Lee, J.-L. ; Yeom, G.-Y.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.243-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
9.

Conference Proceedings
Conference Proceedings
9. Organosiloxane based bottom antireflective coatings for 193nm lithography
Son, E.-K. ; Kim, J.-W. ; Lee, S.-H. ; Park, C.-S. ; Lee, J.-W. ; Kim, J. ; Lee, G.-S. ; Lee, S.-K. ; Ban, K.-D. ; Jung, J.-C. ; Bok, C. K. ; Moon, S.-C.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.449-458,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
10.

Conference Proceedings
Conference Proceedings
10. An efficient wavelet-based motion estimation algorithm
Bae, J.-W. ; Lee, S.-H. ; Yoo, J.-S.
Pub. info.: Applications of digital image processing XXVII : 2-6 August 2004, Denver, Colorado, USA.  pp.890-900,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5558
11.

Conference Proceedings
Conference Proceedings
11. Enhancement ot the vibration stability of a microdiffraction goniometer
Lee, S.-H. ; Preissner, C. ; Lai, B.P. ; Cai, Z. ; Shu, D.
Pub. info.: Optomechanical design and engineering 2002 : 7-9 August 2002, Seattle, USA.  pp.100-110,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4771
12.

Conference Proceedings
Conference Proceedings
12. Optimal dynamic perfomance for high-precision actuators/stages
Preissner, C. ; Lee, S.-H. ; Royston, T.J. ; Shu, D.
Pub. info.: Optomechanical design and engineering 2002 : 7-9 August 2002, Seattle, USA.  pp.91-99,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4771
13.

Conference Proceedings
Conference Proceedings
13. Design of a novel composite cylinder reinforced with a thin SMA layer
Lee, S.-H. ; Kim, C. ; Cho, M.-.
Pub. info.: Smart structures and materials 2003 : Smart structures and integrated systems : 3-6 March 2003, San Diego, California, USA.  pp.559-566,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5056
14.

Conference Proceedings
Conference Proceedings
14. Ultrasmall optical pickup module
Kim, S.-C. ; Kim, Y.S. ; Lee, S.-H. ; Lee, M.-H. ; Kim, J.-Y.
Pub. info.: Optical data storage 2003 : 11-14 May 2003, Vancouver, British Columbia, Canada.  pp.335-340,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5069
15.

Conference Proceedings
Conference Proceedings
15. (4.31) 8:55 - 8:58 PM - VBIC Model Application and Model Parameter Optimization for SiGe HBT
Lee, S.-H. ; Lee, J.-Y. ; Lee, S.-Y. ; Park, C. W. ; Bae, H.-C. ; Kang, J.-Y.(ETRI)
Pub. info.: SiGe: materials, processing, and devices : proceedings of the First international symposium.  pp.385-394,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-07
16.

Conference Proceedings
Conference Proceedings
16. Solid-State Nano-Composite Supercapacitors for Optical Modulation
Lee, S.-H. ; Yan, Y. ; Tracy, C. E. ; Pitts, J. R. ; Deb, S. K.
Pub. info.: Electron transfer in nanomaterials : proceedings of the International Symposium.  pp.225-234,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-22
17.

Conference Proceedings
Conference Proceedings
17. NEW APPROACH FOR STUDY OF PARTICLE ADHESION AND REMOVAL RELEVANT TO POST CMP CLEANING
Lee, S.-Y. ; Lee, S.-H. ; Eom, D.-H. ; Kim, K.-S. ; Song, H.-S. ; Park, J.-G.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.180-186,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
18.

Conference Proceedings
Conference Proceedings
18. EFFECT OF H2O2 AND IPA ADDITION IN DILUTE HF SOLUTION ON SURFACE ETCHING AND PARTICLE REMOVAL EFFICIENCY
Eom, D.-H. ; Lee, S.-H. ; Kim, K.-S. ; Lee, C.-H. ; Park, J.-G.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.156-163,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
19.

Conference Proceedings
Conference Proceedings
19. Effect of Phosphorus or Boron Addition on Water-Resistance of Water-Glass Adhesives
Lim, H.-M. ; Kim, B.-Y. ; Lee, S.-H.
Pub. info.: Eco-materials processing & design : ISEPD-4, proceedings of the 4th International Symposium on Eco-Materials Processing & Design, Gyungpodae, Korea, February 4-6, 2003.  pp.215-220,  2003.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 439
20.

Conference Proceedings
Conference Proceedings
20. Fabrication and Sagging Behavior of Three-Layer Al-Si/Al-Mn-Zn/Al-Si Clad Sheets for Automotive Heat Exchanger
Lee, S.-H. ; Kim, M.-S. ; Jung, D.- ; Han, J.-W. ; You, B.-D.
Pub. info.: Eco-materials processing & design : ISEPD-4, proceedings of the 4th International Symposium on Eco-Materials Processing & Design, Gyungpodae, Korea, February 4-6, 2003.  pp.221-226,  2003.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 439
21.

Conference Proceedings
Conference Proceedings
21. Passivation and Etching Behaviors of Copper Surface in Copper CMP Slurries
Eom, D.-H. ; Hong, Y.-K. ; Lee, S.-H. ; Park, J.-Y. ; Myung, J.-J. ; Park, J.-G. ; Kim, K.-S. ; Song, H.-S. ; Park, H.-S. ; Choi, Y.-S.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.226-236,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-1
22.

Conference Proceedings
Conference Proceedings
22. Control of Surface Morphology in PS and PVP Hybrid Thin Films
Kang, H. ; Kim, S. ; Lee, S.-H. ; Char, K.
Pub. info.: Textures of materials : ICOTOM 13 : proceedings of the 13th International Conference on Textures of Materials, Seoul, Korea, August 26-30, 2002.  pp.1735-1740,  2002.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 408-412
23.

Technical Paper
Technical Paper
23. Simulation of Air Quality in ALS System with Biofiltration.
Lee, S.-H. ; Hebber, A.J. ; Banks, M.K.
Pub. info.: 35th International Conference on Environmental Systems : SAE technical paper.  2005.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2005
24.

Technical Paper
Technical Paper
24. A New Lab for Testing Biofiltration for Advanced Life Support.
Li, C. ; Heber, A.J. ; Jiqin, H.H. ; Ni, J. ; Lee, S.-H.
Pub. info.: 35th International Conference on Environmental Systems : SAE technical paper.  2005.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2005
25.

Conference Proceedings
Conference Proceedings
25. E-beam curing effects on the etch and CD-SEM stability of 193-nm resists
Padmanaban, M. ; Alemy, E. ; Dammel, R.R. ; Kim, W.-K. ; Kudo, T. ; Lee, S.-H. ; McKenzie, D.S. ; Orsi, A. ; Rahman, D. ; Chen, W.-L. ; Sadjadi, R.M. ; Livesay, W.R. ; Ross, M.F.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.606-614,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
26.

Conference Proceedings
Conference Proceedings
26. Implementation of the ArF resists based on VEMA for sub-100-nm device
Kim, H.-W. ; Lee, S. ; Choi, S.-J. ; Lee, S.-H. ; Kang, Y. ; Woo, S.-G. ; Nam, D.S. ; Chae, Y.-S. ; Kim, J.S. ; Moon, J.-T. ; Kavanagh, R.J. ; Barclay, G.G.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.533-540,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
27.

Conference Proceedings
Conference Proceedings
27. Error-resilient method for robust video transmissions
Choi, D.-H. ; Lim, T.-G. ; Lee, S.-H. ; Hwang, C.-S.
Pub. info.: Visual Communications and Image Processing 2003.  Part Two  pp.962-971,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5150
28.

Conference Proceedings
Conference Proceedings
28. Automated CD SEM tilt-ready for primetime: a fast in-line methodology for differentiating lines vs. spaces
Choi, Y.-H. ; Sung, M.-K. ; Lee, S.-H. ; Lee, J.-H. ; Park, J.-H. ; Choi, I.-H. ; Moon, S.-Y. ; Choi, S.-W. ; Han, W.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.351-362,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752
29.

Conference Proceedings
Conference Proceedings
29. Robust TV commercial detection based on audiovisual features
Lee, S.-H. ; Yeh, C.H. ; Kuo, C.-C.J.
Pub. info.: Visual Information Processing XII.  pp.147-158,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5108
30.

Conference Proceedings
Conference Proceedings
30. Cycloolefin/cyanoacrylate (COCA) copolymers for 193-nm and 157-nm lithography
Dammel, R.R. ; Sakamuri, R. ; Lee, S.-H. ; Rahman, M.D. ; Kudo, T. ; Romano, A.R. ; Rhodes, L.F. ; Lipian, J. ; Hacker, C. ; Barnes, D.A.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.101-109,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
31.

Conference Proceedings
Conference Proceedings
31. Error detection and correction using the correlation of the parameters in MPEG-2 video bitstream
Choi, D.-H. ; Lee, S.-H. ; Hwang, C.-S.
Pub. info.: Multimedia Systems and Applications V.  pp.280-290,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4861
32.

Conference Proceedings
Conference Proceedings
32. High-performance 193-nm resist composition using hybrid copolymers of cycloolefin/maleic anhydride (COMA)/methacrylate
Rahman, M.D. ; Alemy, E. ; Conley, W. ; Miller, D. ; Dammel, R.R. ; Kim, W.-K. ; Kudo, T. ; Lee, S.-H. ; Masuda, S. ; McKenzie, D.S. ; Padmanaban, M.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.127-135,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
33.

Conference Proceedings
Conference Proceedings
33. Linearization of DFB laser diode using cross gain modulation (XGM)-based light injection for RoF link [6353-147]
Lee, S.-H. ; Kang, J.-M. ; Kwon, H.-C. ; Won, Y.-Y. ; Han, S.-K.
Pub. info.: Optical Transmission, Switching, and Subsystems IV.  pp.63533U-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6353
34.

Conference Proceedings
Conference Proceedings
34. Aberration sensitivity control for the isolation layer in low-k1 DRAM process
Cho, B.-H. ; Yim, D. ; Park, C.-H. ; Lee, S.-H. ; Yang, H.-J. ; Choi, J.-H. ; Shin, Y.-C. ; Kim, C.-D. ; Choi, J.-S. ; Kang, K.-O. ; Kim, S.-W. ; Yu, T.-H. ; Hong, J. ; Kim, J.-C. ; Han, M.-S. ; Heo, H.-Y. ; Kim, Y.-D. ; Lee, D.-D. ; Yoon, G.-H. ; van schoot, J.B. ; Theeuwes, T. ; Min, Y.-H.
Pub. info.: Optical Microlithography XV.  Part Two  pp.831-839,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
35.

Conference Proceedings
Conference Proceedings
35. Technical issues associated with the detection of buried land mines with high-frequency seismic waves
Lee, S.-H. ; Scott, W.R. Jr. ; Martin, J.S. ; Larson, G.D. ; McCall, G.S., II
Pub. info.: Detection and Remediation Technologies for Mines and Minelike Targets VII.  Part Two  pp.617-628,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4742
36.

Conference Proceedings
Conference Proceedings
36. Improvement of line edge roughness by employing new PAG
Kim, Y.-S. ; Kim, Y.-H. ; Lee, S.-H. ; Yim, Y.-G. ; Kim, D,-B. ; Kim, J.-H.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.829-836,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
37.

Conference Proceedings
Conference Proceedings
37. Illumination, acid diffusion, and process optimization considerations for 193-nm contact hole resists
Kudo, T. ; Alemy, E.L. ; Dammel, R.R. ; Kim, W.-K. ; Lee, S.-H. ; Masuda, S. ; McKenzie, D.S. ; Rahman, M.D. ; Romano, A.R. ; Padmanaban, M. ; Chun, J.-S. ; Jung, J.-C. ; Lee, S.-K. ; Shin, K.-S. ; Kim, H.-S.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.150-159,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
38.

Conference Proceedings
Conference Proceedings
38. Belly button reduction using optimized resist filtration method in CMOS gate pattern process
Baik, J.-H. ; Lee, D.-J. ; Lee, S.-H. ; Park, S.-H. ; Lee, I.-H. ; Choi, J.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.753-760,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
39.

Conference Proceedings
Conference Proceedings
39. Automatic movie skimming with general tempo analysis
Lee, S.-H. ; Yeh, C.-H. ; Kuo, C.-C.J.
Pub. info.: Internet Multimedia Management Systems IV.  pp.46-54,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5242
40.

Conference Proceedings
Conference Proceedings
40. PEB sensitivity studies of ArF resists: II. Polymer and solvent effects
Hong, C.-S. ; Lee, S.-H. ; Kim, W.-K. ; Kudo, T. ; Timko, A. ; Mckenzie, D. ; Anyadiegwu, C. ; Rahman, D.M. ; Lin, G. ; Dammel, R.R. ; Padmanaban, M.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1131-1137,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
41.

Conference Proceedings
Conference Proceedings
41. Simulation of mask CD variation for different local densities with in-house developed e-beam lithography simulator
Kim, M.-Y. ; Ki, W.-T. ; Lee, S.-H. ; Choi, J.-H. ; Choi, S.-W. ; Sohn, J.-M.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.50-58,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
42.

Conference Proceedings
Conference Proceedings
42. Realization of sub-80-nm small-space patterning in ArF photolithography
Kim, S.-H. ; Kim, H.-D. ; Lee, S.-H. ; Park, C.-M. ; Ryoo, M.-H. ; Yeo, G.-S. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1082-1090,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
43.

Conference Proceedings
Conference Proceedings
43. Automatic movie skimming with story units via general tempo analysis
Lee, S.-H. ; Yeh, C.H. ; Kuo, C.-C.J.
Pub. info.: Storage and Retrieval Methods and Applications for Multimedia 2004.  pp.396-407,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5307
44.

Conference Proceedings
Conference Proceedings
44. Investigation of the effect of resist components and process condition on photochemical efficiency of ArF photoresist
Kim, J.-W. ; Son, E.-K. ; Lee, S.-H. ; Kim, D. ; Kim, J. ; Lee, G. ; Jung, J.C. ; Bok, C.K. ; Moon, S.C. ; Shin, K.S.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.599-607,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
45.

Conference Proceedings
Conference Proceedings
45. Optical network unit based on self-seeded reflective semiconductor optical amplifier for WDM-PON [6354-130]
Kang, J.-M. ; Lee, S.-H. ; Kwan, H.-C. ; Han, S.-K.
Pub. info.: Network Architectures, Management, and Applications IV.  pp.63543E-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6354
46.

Conference Proceedings
Conference Proceedings
46. Effects of quencher ability on profile in chemically amplified resist system
Kim, D. ; Kim, H.-J. ; Cho, S.-H. ; Lee, D.-H. ; Im, K.-H. ; Yoo, M.-J. ; Lee, S.-H. ; Kim, J. ; Kim, J.-S. ; Kim, H.-S.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1086-1097,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
47.

Conference Proceedings
Conference Proceedings
47. Improvement of pattern collapse in sub-100 nm nodes
Jung, M.-H. ; Lee, S.-H. ; Kim, H.-W. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1298-1303,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
48.

Conference Proceedings
Conference Proceedings
48. Adaptability and validity of thin organic bottom anti-reflective coating (BARC) to sub-90-nm patterning in ArF lithography
Kim, S.-H. ; Lee, S.-H. ; Yeo, G.-S. ; Lee, J.H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.940-947,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
49.

Conference Proceedings
Conference Proceedings
49. Advanced RELACS (resolution enhancment of lithography by assist of chemical shrink) material for 193-nm lithography
Hong, S. ; Takano, Y. ; Kanda, T. ; Kudo, T. ; Padmanaban, M. ; Tanaka, H. ; Lee, S.-H. ; Lee, J.-H. ; Woo, S.-G.
Pub. info.: Advances in Resist Technology and Processing XX.  1  pp.195-206,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
50.

Conference Proceedings
Conference Proceedings
50. What an antishrinkage coating method can surmount among stumbling block of ArF resists
Kim, H.-D. ; Lee, S.-H. ; Choi, S.-J. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.827-837,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039