1.

Conference Proceedings

Conference Proceedings
Kling,M.E. ; Lucas,K.D. ; Reich,A. ; Roman,B.J. ; Chuang,H. ; Gilbert,P.V. ; Grobman,W.D. ; Travis,E.O. ; Tsui,P. ; Vuong,T. ; West,J.P.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.204-214,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings

Conference Proceedings
Sturtevant,J.L. ; Allgair,J. ; Fu,C.-C. ; Green,K.G. ; Hershey,R.R. ; Kling,M.E. ; Litt,L.C. ; Lucas,K.D. ; Roman,B.J. ; Seligman,C.S. ; Schippers,M.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.220-227,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
3.

Conference Proceedings

Conference Proceedings
McCallum,M. ; Lucas,K.D ; Maltabes,J.G. ; Kling,M.E.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.391-402,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
4.

Conference Proceedings

Conference Proceedings
Litt,L.C. ; Kling,M.E. ; Perkinson,T.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.243-254,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
5.

Conference Proceedings

Conference Proceedings
Kling,M.E. ; Cave,N. ; Falch,B.J. ; Fu,C.-C. ; Green,K.G. ; Lucas,K.D. ; Roman,B.J. ; Reich,A.J. ; Sturtevant,J.L. ; Tian,R. ; Russell,D.R. ; Karklin,L. ; Wang,Y.-T.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.10-17,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
6.

Conference Proceedings

Conference Proceedings
Kling,M.E.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.572-582,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884
7.

Conference Proceedings

Conference Proceedings
Nelson-Thomas,C. ; Kling,M.E. ; Thompson,M.A. ; Wang,R. ; Cave,N. ; Fu,C.-C.
Pub. info.: Optical Microlithography XIV.  4346  pp.464-470,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346