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11 results

Conference Proceedings

1. Plasma-assisted cleaning by electrostatics (PACE)

W. M. Lytle ; H. Shin ; D. N. Ruzic

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

2. A report on the modeling efforts in the development of a distributed EUV source for next-generation lithography tools

J. B. Spencer ; D. A. Alman ; B. E. Jurczyk ; D. N. Ruzic

Pub. info.:	Emerging lithographic technologies XI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6517

Conference Proceedings

3. Gibbsian segregating alloys: a potential solution to minimize collector degradation

H. Qiu ; S. N. Srivastava ; J. C. Anderson ; D. N. Ruzic

Pub. info.:	Emerging lithographic technologies XI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6517

Conference Proceedings

4. Debris mitigation techniques for a Sn- and Xe-fueled EUV-light source

K. C. Thompson ; S. N. Srivastava ; E. L. Antonsen ; D. N. Ruzic

Pub. info.:	Emerging lithographic technologies XI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6517

Conference Proceedings

5. Effect of deposition, sputtering, and evaporation of lithium debris buildup on EUV optics

M. J. Neumann ; M. Cruce ; P. Brown ; S. N. Srivasta ; D. N. Ruzic ; O. Khodykin

Pub. info.:	Emerging lithographic technologies XI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6517

Conference Proceedings

6. Contamination removal from collector optics and masks: an essential step for next-generation lithography

H. Shin ; S. N. Srivastava ; D. N. Ruzic

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

7. Grazing incidence ion beams for reducing LER

C. R. M. Struck ; M. J. Neumann ; R. Raju ; R. L. Bristol ; D. N. Ruzic

Pub. info.:	Lithography Asia 2008. 2 pp.71402P-1-71402P-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7140

Conference Proceedings

8. EUVL contamination control studies for high-volume manufacturing

D. N. Ruzic ; R. Raju ; J. Sporre ; H. Shin ; W. M. Lytle

Pub. info.:	Lithography Asia 2008. 1 pp.714006-1-714006-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7140

Conference Proceedings

9. Ionic debris assessment of various EUVL systems

C. H. Castano ; D. N. Ruzic ; S. N. Srivastava ; K. C. Thompson ; J. Sporre

Pub. info.:	Emerging lithographic technologies XII. 2 pp.692137-1-692137-13, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6921

10.

Conference Proceedings

10. Lithium debris removal by sputtering and evaporation for EUV optics and applications

M. J. Neumann ; M. J. Cruce ; D. N. Ruzic

Pub. info.:	Emerging lithographic technologies XII. 2 pp.69213D-1-69213D-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6921

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