Vasanth, K. ; Apte, P. ; Davis, J. ; Saxena, S. ; Burch, R. ; Rao, S. ; Mozumder, P. K.
Pub. info.:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.325-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Vasanth, K. ; Apte, P. ; Davis, J. ; Saxena, S. ; Burch, R. ; Rao, S. ; Mozumder, P. K.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.253-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Saxena, S. ; Guardiani, C. ; Quarantelli, M. ; Dragone, N. ; Minehane, S. ; McNamara, P. ; Babcock, J.A.
Pub. info.:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.246-250, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering