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Conference Proceedings

1. ANISOTROPIC ETCHING OF HEAVILY DOPED POLYSILICON BY A HOT C12 MOLECULAR BEAM

Ono, T. ; Hiraoka, S. ; Suzuki, K.

Pub. info.:	Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.. pp.31-36, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	201

Conference Proceedings

2. Monolithic PZT microstage wth multidegrees of freedom for high-precision positioning [6032-05]

Xu, G. H. ; Okamoto, K. ; Zhang, Y. D. ; Ono, T. ; Esashi, M.

Pub. info.:	ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China. pp.603205-603205, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6032

Conference Proceedings

3. Hydrogenation of Aromatic Compounds Related to Fuels over a Hydrogen Storage Alloy

Nakagawa, S. ; Ono, T. ; Murata, S. ; Nomura, M. ; Sakai, T.

Pub. info.:	Catalysts in petroleum refining and petrochemical industries, 1995 : proceedings of the 2nd International Conference on Catalysts in Petroleum Refining and Petrochemical Industries, Kuwait, April 22-26, 1995. pp.499-, 1996. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	100

Conference Proceedings

4. Tunnel profile measurement by vision metrology toward application to NATM

Hattori, S. ; Akimoto, K. ; Ono, T. ; Miura, S.

Pub. info.:	Machine vision applications in industrial inspection XI :proceedings of electronic imaging science and technology 2003 : 22-24 January 2003, Santa Clara, California, USA. pp.50-58, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5011

Conference Proceedings

5. RADIAL DISTRIBUTION OF THERMALLY-INDUCED DEFECTS IN HEAVILY BORON-DOPED SILICON WAFERS

Asayama, E. ; Ono, T. ; Takeshita, M. ; Hourai, M. ; Sano, M. ; Tsuya, H.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.546-556, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(1)

Conference Proceedings

6. EFFECT OF HEAVY BORON DOPING ON OXIDE PRECIPITATE GROWTH IN CZOCHRALSKI SILICON

Ono, T. ; Asayama, E. ; Horie, H. ; Hourai, M. ; Sueoka, K. ; Tsuya, H. ; Rozgonyi, G.A.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1113-1125, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(2)

Conference Proceedings

7. Oxygen Precipitation Behaviour in 300 mm Polished Czochralski Silicon Wafers

Ono, T. ; Rozgonyi, G.A. ; Au, C. ; Messina, T. ; Goodall, R.K. ; Huff, H.R.

Pub. info.:	Proceedings of the Fifth International Symposium on High Purity Silicon V. pp.125-134, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-13

Conference Proceedings

8. Impact of Heavy Boron and Antimony Doping on COPs and GOI

Ono, T. ; Hone, H. ; Miyazaki, M. ; Tsuya, H. ; Rozgonyi, G.A.

Pub. info.:	Proceedings of the Third International Symposium on Defects in Silicon. pp.300-312, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-1

Conference Proceedings

9. Effect of Heavy Boron Doping on Oxygen Precipitation in Czochralski Silicon Substrates of Epitaxial Wafers

Sucoka, K. ; Yonemura, M. ; Akatsuka, M. ; Katahama, H. ; Ono, T. ; Asayama, E.

Pub. info.:	Proceedings of the Third International Symposium on Defects in Silicon. pp.253-267, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-1

10.

Conference Proceedings

10. Corrosion Behavior of Magnetically Graded Materials Made by Martensitic Transformation

Noda, K. ; Ono, T. ; Masuda, H. ; Kodania, T. ; Sakai, H. ; Watanabe, Y.

Pub. info.:	Critical factors in localized corrosion IV : a symposium in honor of the 65th birthday of Hans Böhni : proceedings of the international symposium. pp.685-691, 2002. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-24

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