1.

Conference Proceedings
Conference Proceedings
1. PARTICLE REMOVAL EFFICIENCY OF DILUTED HF SOLUTIONS
Alessandri, M. ; Bellandi, E. ; Pipia, F. ; Crivelli, B. ; Wolke, K. ; Schenkl, M.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.523-527,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. THE ST CLEAN DUAL STEP CLEANING CONCEPT
Bellandi, R. ; Alessandri, M. ; Lodi, D. ; Pipia, F.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.25-29,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
3.

Conference Proceedings
Conference Proceedings
3. EFFICIENCY OF OZONE DISSOLUTION INTO AMBIENT TEMPERATURE RINSE BATHS
Wolke, K. ; Schenkl, M. ; Alessandri, M. ; Bellandi, E.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.239-246,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
4.

Conference Proceedings
Conference Proceedings
4. OPTIMIZATION OF ETCHING UNIFORMITY AND REPEATABILITY IN DILUTED HF
Bellandi, E. ; Alessandri, M. ; Tonti, A. ; Pipia, F. ; Wolke, K. ; Schenkl, M. ; Geomini, M. ; Kwakman, L.F.T.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.207-212,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
5.

Conference Proceedings
Conference Proceedings
5. Ultrathin NO/N2O oxynitride dielectric for advanced flash memory application: Single wafer and batch technology
Zonca, R. ; Crivelli, B. ; Polignano, M. L. ; Cazzaniga, F. ; Alessandri, M. ; Caricato, A. P. ; Bersani, M. ; Sbetti, M. ; Vanzetti, L. ; Xing, G. C. ; Miner, G. E. ; Astici, N. ; Kuppurao, S. ; Lopes, D. ; Nesso, S.
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.141-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592
6.

Conference Proceedings
Conference Proceedings
6. Characterization of nitrided silicon-silicon dioxide interfaces
Polignano, M. L. ; Alessandri, M. ; Brazzelli, D. ; Crivelli, B. ; Ghidini, G. ; Zonca, R. ; Caricato, A. P. ; Bersani, M. ; Sbetti, M. ; Vanzetti, L. ; Xing, G. C. ; Miner, G. E. ; Astici, N. ; Kuppurao, S. ; Lopes, D.
Pub. info.: Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A..  pp.207-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 591
7.

Conference Proceedings
Conference Proceedings
7. Optical Characterisation of High-? Materials Deposited by ALCVD
Bellandi, E. ; Crivelli, B. ; Elbaz, A. ; Alessandri, M. ; Boher, P. ; Defranoux, C.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.316-321,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
8.

Conference Proceedings
Conference Proceedings
8. PREVENTION OF Si ETCHING IN DILUTED SC1 SOLUTIONS
Bellandi, E. ; Alessandri, M. ; Lodi, D. ; Strada, M. ; Pipia, S. ; Petitdidier, S. ; Levy, D.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.337-344,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
9.

Conference Proceedings
Conference Proceedings
9. EFFECT OF WAFER BACKSIDE ON PARTICLE ADDITION BEHAVIOUR OF HF-RCA SEQUENCE
Strada, M. ; Lodi, D. ; Bellandi, E. ; Alessandri, M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.172-179,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
10.

Conference Proceedings
Conference Proceedings
10. Optical Characterisation of High-? Materials Deposited by ALCVD
Bellandi, E. ; Crivelli, B. ; Elbaz, A. ; Alessandri, M. ; Boher, P. ; Defranoux, C.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.316-321,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-3
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Conference Proceedings
Conference Proceedings
11. Crystallization Behavior of Hf-Rich Aluminates and Influence on Film Dielectric Properties
Climent, M. ; Crivelli, B. ; Righini, G. ; Alberici, S. ; Alessandri, M. ; Elbaz, A.C. ; Pavia, G. ; Wiemer, C.
Pub. info.: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.313-318,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 811
12.

Conference Proceedings
Conference Proceedings
12. Physical-Chemical Evolution of Hf-Aluminates Upon Thermal Treatments
Crivelli, B. ; Alessandri, M. ; Alberici, S. ; Brazzelli, D. ; Elbaz, A. C. ; Frabboni, S. ; Ghidini, G. ; Maes, J. W. ; Ottaviani, G. ; Pavia, G. ; Wiemer, C.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.65-72,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
13.

Conference Proceedings
Conference Proceedings
13. Physical-Chemical Evolution Upon Thermal Treatments of Al2O3, HfO2 and Al/Hf Composite Materials Deposited by ALCVDTM
Crivelli, B. ; Alessandri, M. ; Alberici, S. ; Cazzaniga, F. ; Dekadjevi, D. ; Maes, J.W. ; Ottaviani, G. ; Pavia, G. ; Queirolo, G. ; Santucci, S. ; Zanderigo, F.
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.149-154,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745
14.

Conference Proceedings
Conference Proceedings
14. Electrical Characterization of Highly Reliable 80Å Oxide
Ghidini, G. ; Alessandri, M. ; Clementi, C. ; Drera, D.
Pub. info.: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.645-656,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-1