1.

Conference Proceedings
Conference Proceedings
1. Etching quartz with inductively coupled plasma etching equipment
Wu, X. ; Zhou, C. ; Xi, P. ; Dai, E. ; Ru, H. ; Liu, L.
Pub. info.: Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA.  pp.192-198,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5183
2.

Conference Proceedings
Conference Proceedings
2. Symmetric color separation grating
Zhou, C. ; Zhang, Y. ; Xi, P. ; Dai, E. ; Wu, X. ; Liu, L.
Pub. info.: Photonic Devices and Algorithms for Computing V.  pp.174-179,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5201