1.

Conference Proceedings
Conference Proceedings
1. Interfacial Fluid Pressure and Its Effects on SiO2 Chemical Mechanical Polishing
Zhou, C. ; Shan, L. ; Hight, J.R. ; Ng, S.H. ; Paszkowski, A.J. ; Tichy, J. ; Danyluk, S.
Pub. info.: Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A..  pp.E7.1-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 613
2.

Technical Paper
Technical Paper
2. Nanoparticulate and Interfacial Mechanics in Confined Geometries Typical of Chemical-mechanical Planarization.
Ng, S. H. ; Zettner, C. M. ; Zhou, C. ; Yoon, I. -H. ; Danyluk, S.
Pub. info.: A.S.M.E. paper.  2003.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : IMECE
Ser. no.: 2003