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Study on lateral dual-element electron tunneling accelerometer

Author(s):
Li, Y. ( Tsinghua Univ. (China) )
Li, Q.
Long, Z.
Zi, Y.
Zhao, D.
Guo, Y.
1 more
Publication title:
Fifth International Symposium on Instrumentation and Control Technology : 24-27 October 2003, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5253
Pub. Year:
2003
Page(from):
23
Page(to):
28
Pages:
6
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819451378 [0819451371]
Language:
English
Call no.:
P63600/5253
Type:
Conference Proceedings

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