1.

Conference Proceedings
Conference Proceedings
1. Surface conditioning solutions for pattern collapse reduction
Zhang, P. ; Jaramillo, M., Jr. ; King, D.M. ; Rao, M.B. ; O'Brien, B.L. ; Ross, B.F.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.807-812,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
2.

Conference Proceedings
Conference Proceedings
2. Surface conditioning solutions to reduce resist line roughness
Zhang, P. ; Jaramillo, M., Jr. ; Rao, M.B. ; Yates, C. ; King, D.M. ; Ross, B.F. ; O'Brien, B.L.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.801-806,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
3.

Conference Proceedings
Conference Proceedings
3. Impact of surfactant in developer on CD performance
Zhang, P. ; Jaramillo, M. Jr., ; King, D.M. ; Markley, T.J. ; Zarkov, Z. ; Witko, D. ; Paxton, T.A. ; Davis, T.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1402-1408,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
4.

Conference Proceedings
Conference Proceedings
4. Impact of surfactant in developer and rinse solution on 193-nm lithography performance
Zhang, P. ; Jaramillo, M. Jr., ; King, D.M. ; Ross, B. ; Witko, D. ; Paxton, T.A. ; Davis, T.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1409-1415,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039