1.

Conference Proceedings
Conference Proceedings
1. Simulation-based scattering bar generation for 65nm and beyond [5992-173]
Hung, C. -Y. ; Liu, Q. ; Zhang, L.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599252-599252,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
2.

Conference Proceedings
Conference Proceedings
2. Integrated post tape outflow for fast design to mask turn-around time [5992-172]
Hung, C. -Y. ; Liu, Q. ; Zhang, L. ; Shang, S. ; Bailey, G. E. ; Jost, A. ; Brist, T.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599251-599251,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
3.

Conference Proceedings
Conference Proceedings
3. Illumination optimization for 65nm technology node [6349-188]
Wang, C.-H. ; Liu, Q. ; Zhang, L. ; Hung, C.-Y.
Pub. info.: Photomask Technology 2006.  pp.63494V-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
4.

Conference Proceedings
Conference Proceedings
4. Lithography process related OPC development and verification demonstration on a sub-9Onm poly layer [5853-52]
Hung, C.-Y. ; Liu, Q. ; Zhang, L. ; Shang, S. ; Jost, A.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.678-685,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
5.

Conference Proceedings
Conference Proceedings
5. Model-based insertion and optimization of assist features with application to contact layers [5992-71]
Shang, S. D. ; Granik, Y. ; Swallow, L. ; Zhang, L. ; Brist, T. ; Torres, A. ; Hung, C. ; Liu, Q.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921Y-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
6.

Conference Proceedings
Conference Proceedings
6. A novel approach for full chip SRAF printability check [6154-124]
Hung, C. Y. ; Zhang, L. ; Liu, Q.
Pub. info.: Optical Microlithography XIX.  pp.615438-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
7.

Conference Proceedings
Conference Proceedings
7. A methodology to take LER effect into OPC modeling algorithm [6154-125]
Hung, C. Y. ; Liu, Q. ; Deng, Z. ; Zhang, L.
Pub. info.: Optical Microlithography XIX.  pp.615439-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
8.

Conference Proceedings
Conference Proceedings
8. No-forbidden-pitch SRAF rules for advanced contact lithography [6349-177]
Wang, C.-H. ; Liu, Q. ; Zhang, L. ; Hung, C.-Y.
Pub. info.: Photomask Technology 2006.  pp.63494K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
9.

Conference Proceedings
Conference Proceedings
9. Minimizing yield-loss risks through post-OPC verification [6349-180]
Wang, C. ; Liu, Q. ; Zhang, L. ; Gao, G.-S. ; Brist, T. E. ; Donnelly, T. ; Shang, S.
Pub. info.: Photomask Technology 2006.  pp.63494N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
10.

Conference Proceedings
Conference Proceedings
10. A novel nano-optics polarization beam splitter/combiner for telecom applications
Zhou, L. ; Liu, W. ; Liu, Q. ; Zhang, L. ; Yang, T.
Pub. info.: Passive Components and Fiber-based Devices.  pp.248-253,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5623