1.

Conference Proceedings
Conference Proceedings
1. Fabrication of supersmooth surfaces with low subsurface damage
Z. Shen ; B. Ma ; Z. Wang ; Y. Ji ; T. Liu
Pub. info.: Advanced optical manufacturing technologies.  2  pp.67223W-1-67223W-6,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6722
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of flat and supersmooth surfaces with bowl-feed polishing process
Z. Shen ; B. Ma ; Z. Wang ; Y. Ji ; T. Liu
Pub. info.: Advanced optical manufacturing technologies.  1  pp.67220U-1-67220U-7,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6722
3.

Conference Proceedings
Conference Proceedings
3. Quantitative characterization of supersmooth surface with roughness in the sub-nanometer range
Z. Shen ; Z. Wang ; B. Ma ; L. Wang ; Y. Ji
Pub. info.: 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment.  1  pp.72830B-1-72830B-6,  2009.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7283