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Nanometrology based on white-light spectral interferometry in thickness measurement

Author(s):
  • H. Chen ( China Jiliang Univ., China )
  • T. Liu ( China Jiliang Univ., China )
  • Z. Meng ( China Jiliang Univ., China )
Publication title:
Nanophotonics, nanostructure, and nanometrology II : 12-14 November 2007, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6831
Pub. Year:
2008
Page(from):
683108-1
Page(to):
683108-4
Pages:
4
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470065 [0819470066]
Language:
English
Call no.:
P63600/6831
Type:
Conference Proceedings

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