1.
|
Conference Proceedings
|
Lee, K. M. ; Yedur, S. ; Tabet, M. ; Tavassoli, M.
Pub. info.: |
25th Annual BACUS Symposium on Photomask Technology. pp.59921I-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5992 |
|
2.
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Conference Proceedings
|
Yedur, S. ; Vuong, V. ; Shivaprasad, D. ; Sarathy, T. P. ; Tabet, M. ; Korlahalli, R. ; Hu, J.
Pub. info.: |
25th Annual BACUS Symposium on Photomask Technology. pp.59924I-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5992 |
|
3.
|
Conference Proceedings
|
Lee, K. ; Yedur, S. ; Tavassoli, M. ; Baik, K. ; Tabet, M.
Pub. info.: |
Photomask Technology 2006. pp.63490M-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6349 |
|
4.
|
Conference Proceedings
|
Cho, S. ; Yedur, S. ; Kwon, M. ; Tabet, M.
Pub. info.: |
Photomask Technology 2006. pp.63492I-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6349 |
|