1.

Conference Proceedings

Conference Proceedings
Ishii,H. ; Yagi,S. ; Minotani,T. ; Royter,Y. ; Kudou,K. ; Yano,M. ; Nagatsuma,T. ; Machida,K. ; Kyuragi,H.
Pub. info.: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.210-219,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4557
2.

Conference Proceedings

Conference Proceedings
Ishii,H. ; Yagi,S. ; Saito,K. ; Hirata,A. ; Kudo,K. ; Yano,M. ; Nagatsuma,T. ; Machida,K. ; Kyuragi,H.
Pub. info.: Micromachining and Microfabrication.  pp.43-52,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4230