Kittl, J. A. ; Hong, Q. Z. ; Yang, H. ; Yu, N. ; Rodder, M. ; Apte, P. P. ; Shiau, W. T. ; Chao, C. P. ; Breedijk, T. ; Pas, M. F.
Pub. info.:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.331-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Kittl, J. A. ; Hong, Q. Z. ; Yang, H. ; Yu, N. ; Rodder, M. ; Apte, P. P. ; Shiau, W. T. ; Chao, C. P. ; Breedijk, T. ; Pas, M. F.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.255-, 1998. Warrendale, Pa.. MRS - Materials Research Society