Yang, H. ; Tweet, D.J. ; Stecker, L.H. ; Pan, W. ; Evans, D.R. ; Hsu, S.
Pub. info.:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D3.3-, 2001. Warrendale, PA. Materials Research Society