1.

Conference Proceedings

Conference Proceedings
Hara, T. ; Takasoh, J. ; Yang, H. ; Tweet, D.J. ; Nguyen, T. ; Ma, Y. ; Evans, D.R. ; Hsu, S.T.
Pub. info.: Dielectric material integration for microelectronics.  pp.79-87,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-3
2.

Conference Proceedings

Conference Proceedings
Yang, H. ; Tweet, D.J. ; Stecker, L.H. ; Pan, W. ; Evans, D.R. ; Hsu, S.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D3.3-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612