1.

Conference Proceedings
Conference Proceedings
1. Damping caused by the gas flow in the holes of perforated structures
Yang, H. ; Bao, M. ; Pakula, L. ; French, P.J.
Pub. info.: Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia.  pp.307-313,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4593
2.

Conference Proceedings
Conference Proceedings
2. Phase detection scheme of vibratory gyroscope by 2D driving operation
Yang, H. ; Bao, M. ; Yin, H. ; Shen, S. ; Xiong, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.31-37,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
3.

Conference Proceedings
Conference Proceedings
3. Experiments and a new model on damping in rare air
Yin, H. ; Bao, M. ; Yang, H. ; Shen, S. ; Xiong, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.167-172,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601