1.

Conference Proceedings
Conference Proceedings
1. THE ASPECTS OF THERMAL ANNEAL TO INTRINSIC STRESS AND MICROSTRUCTURE OF MULTILAYER THIN FILMS
Yang, C. H. ; Chen, P. C.
Pub. info.: Interfaces between polymers, metals, and ceramics : symposium held April 25-27, 1989, San Diego, California, U.S.A..  pp.291-298,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 153
2.

Conference Proceedings
Conference Proceedings
2. Improvement of OPC accuracy for 65nm node contact using KIF [6155-22]
Wu, T. H. ; Lin, C. L. ; Chen, M. J. ; Tsai, Z. H. ; Ao, C. Y. ; Thung, H. C. ; Liou, J. S. ; Yang, C. H. ; Lin, L. C.
Pub. info.: Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA.  pp.61550M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6155
3.

Conference Proceedings
Conference Proceedings
3. TEMPERATURE DEPENDENCE OF STRESS RELAXATION AT THE COPPER/POLYIMIDE INTERFACE
Chen, S. T. ; Yang, C. H. ; Tong, H. M. ; Ho, P. S.
Pub. info.: Scattering, deformation, and fracture in polymers : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.351-356,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 79
4.

Conference Proceedings
Conference Proceedings
4. GaN Growth by Nitrogen ECR-CVD Method
Chen, K. H. ; Chao, C. H. ; Chuang, T. J. ; Yang, Y. J. ; Chen, L. C. ; Chen, C. K. ; Huang, Y. F. ; Yang, C. H. ; Lin, H. Y. ; Chang, I. M. ; Chen, Y. F.
Pub. info.: III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A..  pp.377-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 423
5.

Technical Paper
Technical Paper
5. An evaluation of the neuber and glinka relations for monotonic loading
Sharpe, W. N., Jr. ; Yang, C. H. ; Tregoning, R. L.
Pub. info.: A.S.M.E. paper.  pp.1P-,  1991.  New York, NY.  The American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : WA/APM
Ser. no.: 1991
6.

Conference Proceedings
Conference Proceedings
6. The investigation of 193nm CPL 3D topology mask effect on wafer process performance [6154-87]
Cheng, Y. F. ; Chou, Y. L. ; Yang, C. H.
Pub. info.: Optical Microlithography XIX.  pp.61542D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
7.

Conference Proceedings
Conference Proceedings
7. Inspection of integrated circuit database through reticle and wafer simulation: the lithography process window performance monitoring [5992-141]
Su, B. ; Verma, G. ; Wolk, W. ; Ahmadian, M. ; Du, H. ; Vikram, A. ; Andrews, S. ; Cheng, Y. F. ; Chou, Y. L. ; Yang, C. H. ; Lin, C.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599244-599244,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992