Su, B. ; Verma, G. ; Wolk, W. ; Ahmadian, M. ; Du, H. ; Vikram, A. ; Andrews, S. ; Cheng, Y. F. ; Chou, Y. L. ; Yang, C. H. ; Lin, C.
Pub. info.:
25th Annual BACUS Symposium on Photomask Technology. pp.599244-599244, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering