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Improvement of OPC accuracy for 65nm node contact using KIF [6155-22]

Author(s):
Wu, T. H. ( United Microelectronics Corp. (Taiwan) )
Lin, C. L. ( United Microelectronics Corp. (Taiwan) )
Chen, M. J. ( United Microelectronics Corp. (Taiwan) )
Tsai, Z. H. ( United Microelectronics Corp. (Taiwan) )
Ao, C. Y. ( United Microelectronics Corp. (Taiwan) )
Thung, H. C. ( United Microelectronics Corp. (Taiwan) )
Liou, J. S. ( United Microelectronics Corp. (Taiwan) )
Yang, C. H. ( United Microelectronics Corp. (Taiwan) )
Lin, L. C. ( United Microelectronics Corp. (Taiwan) )
4 more
Publication title:
Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6155
Pub. Year:
2006
Page(from):
61550M
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461988 [0819461989]
Language:
English
Call no.:
P63600/6155
Type:
Conference Proceedings

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