1.

Conference Proceedings

Conference Proceedings
Tomo, Y. ; Kojima, Y. ; Shimizu, S. ; Watanabe, M. ; Takenaka, H. ; Yamashita, H. ; Iwasaki, T. ; Takahashi, K. ; Yamabe, M.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.786-797,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
2.

Conference Proceedings

Conference Proceedings
Takenaka, H. ; Yamashita, H. ; Takahashi, K. ; Tomo, Y. ; Watanabe, M. ; Iwasaki, T. ; Yamamoto, J. ; Yamabe, M.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.559-569,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
3.

Conference Proceedings

Conference Proceedings
Takenaka, H. ; Yamashita, H. ; Koike, K. ; Yamabe, M.
Pub. info.: Emerging Lithographic Technologies VII.  2  pp.962-971,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037