Probing the Elementary Surface Reactions of Hydrogenated Silicon PECVD by In Situ ESR
- Author(s):
- Publication title:
- Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 536
- Pub. Year:
- 1999
- Page(from):
- 463
- Pub. info.:
- Warrendale, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994423 [1558994424]
- Language:
- English
- Call no.:
- M23500/536
- Type:
- Conference Proceedings
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