MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK. pp.193-201, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the 15th International Conference on Defects in Semiconductors : Budapest, Hungary, August 22-26, 1988. Part1 pp.207-212, 1989. Aederlmannsdorf, Switzwelns. Trans Tech Publications