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Excimer-laser-beam-scanning chemical vapor deposition of ultrathin multilayer films for soft x-ray mirrors

Author(s):
Publication title:
Laser-induced thin film processing : 8-10 February 1995, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2403
Pub. Year:
1995
Page(from):
270
Page(to):
279
Pages:
10
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417503 [0819417505]
Language:
English
Call no.:
P63600/2403
Type:
Conference Proceedings

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