1.

Conference Proceedings
Conference Proceedings
1. Optimization of mask manufacturing rule check constraint for model based assist feature generation
S. Shim ; Y. Kim ; Y. Chun ; S. Lee
Pub. info.: Lithography Asia 2008.  2  pp.714030-1-714030-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
2.

Conference Proceedings
Conference Proceedings
2. Study of the mask topography effect on the OPC modeling of hole patterns
S. Shim ; Y. Kim ; S. Lee ; S. Choi ; W. Han
Pub. info.: Optical Microlithography XXI.  3  pp.69243R-1-69243R-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924