1.

Technical Paper
Technical Paper
1. Experimental Evaluation of Model-Free Hybrid Fault Detection and Isolation
S. Yoon ; S. Kim ; Y. Kim ; J. Choi ; J. Lee ; E. Kim
Pub. info.: AIAA meeting papers on disc.  2007.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Guidance Navigation and Control Conference
Ser. no.: 2007
2.

Conference Proceedings
Conference Proceedings
2. The choice of mask in consideration of polarization effects at high NA system
S. Kim ; S. Yu ; Y. Kim ; J. Lee ; H. Cho
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings
Conference Proceedings
3. OPC in memory-device patterns using boundary layer model for 3-dimensional mask topographic effect
Y. Kim ; I. Kim ; J. Park ; S. Kim ; S. Suh ; Y. Cheon ; S. Lee ; J. Lee ; C. Kang ; J. Moon ; J. Cobb ; S. Lee
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
4.

Conference Proceedings
Conference Proceedings
4. Merged contact OPC using pattern type specific modeling and correction
S. Suh ; S. Kim ; S. Lee ; Y. Kim ; J. Lee ; C. Kang
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607