1.

Conference Proceedings
Conference Proceedings
1. An explosive haze formation under low energy exposure
J. Lee ; Y. Kim ; Y. Choi ; C. Kim
Pub. info.: Photomask and next-generation lithography mask technology XV.  2  pp.70282B-1-70282B-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
2.

Conference Proceedings
Conference Proceedings
2. The source of carbon contamination for EUV mask production
Y. Kim ; J. Lee ; Y. Choi ; C. Kim
Pub. info.: Photomask and next-generation lithography mask technology XV.  2  pp.70281U-1-70281U-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028