S. Chopra ; Z. Ye ; A. Zojaji ; Y. Kim ; S. Kuppurao
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment. pp.307-312, 2008. Pennington, N.J.. Electrochemical Society
Y. Kim ; Z. Ye ; A. Lam ; A. Zojaji ; Y. Cho ; S. Kuppurao
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.409-418, 2007. Pennington, NJ. Electrochemical Society