1.

Technical Paper

Technical Paper
H. Sung ; S. Yoon ; H. Yeom ; J. Kim ; Y. Ko ; Y. Kim ; S. Oh
Pub. info.: AIAA meeting papers on disc.  2008.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2008
2.

Conference Proceedings

Conference Proceedings
Y. Choi ; S. Oh ; M. Kim ; Y. Kim ; C. Kim
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.70281O-1-70281O-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
3.

Conference Proceedings

Conference Proceedings
Y. Choi ; S. Oh ; M. Kim ; Y. Kim ; C. Kim
Pub. info.: Emerging lithographic technologies XII.  2  pp.692123-1-692123-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921