1.

Conference Proceedings

Conference Proceedings
Y. Choi ; S. Oh ; M. Kim ; Y. Kim ; C. Kim
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.70281O-1-70281O-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
2.

Conference Proceedings

Conference Proceedings
Y. Choi ; S. Oh ; M. Kim ; Y. Kim ; C. Kim
Pub. info.: Emerging lithographic technologies XII.  2  pp.692123-1-692123-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921