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Elfect of Deposition Sequence and Plasma Treatment on ALCVD HfO2 n-MOSFET Properties

Author(s):
C. Lim
Y. Kim
A. Hou
J. Gutt
S. Marcus
C. Pomarede
E. Shero
H. de Waard
C. Werkhoven
L. Chen
J. Tamim
N. Chaudhary
G. Bersuker
J. Barnett
C. Young
P. Zeitzoff
G. A. Brown
M. Gardner
R. W. Murto
H. R. Huff
15 more
Publication title:
Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-28
Pub. Year:
2002
Page(from):
83
Page(to):
92
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773959 [1566773954]
Language:
English
Call no.:
E23400/200228
Type:
Conference Proceedings

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