1.

Conference Proceedings
Conference Proceedings
1. Nitrogen Incorporation and High Temperature Forming Gas Anneal For High-K Gate Dielectrics
J. C. Lee ; R. Choi ; K. Onishi ; N. Cho ; C. Kang ; Y. Kim ; S. Krishnan
Pub. info.: Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues.  pp.171-178,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-28
2.

Conference Proceedings
Conference Proceedings
2. OPC in memory-device patterns using boundary layer model for 3-dimensional mask topographic effect
Y. Kim ; I. Kim ; J. Park ; S. Kim ; S. Suh ; Y. Cheon ; S. Lee ; J. Lee ; C. Kang ; J. Moon ; J. Cobb ; S. Lee
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings
Conference Proceedings
3. Merged contact OPC using pattern type specific modeling and correction
S. Suh ; S. Kim ; S. Lee ; Y. Kim ; J. Lee ; C. Kang
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607