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Study of Ni-Silicide Contacts to Si:C Source/Drain.

Author(s):
S. Mertens
Y. Cho
F. Nouri
R. Schreutelkamp
Y. Kim
P. Verheyen
J. Steenbergen
C. Vrancken
H. Bender
O. Richard
B. Van Daele
W. Vandervorst
P. Absil
S. Kubicek
C. Demeurisse
Z. Tokei
A. Lauwers
L. Geenen
13 more
Publication title:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment
Title of ser.:
ECS transactions
Ser. no.:
3(2)
Pub. Year:
2006
Page(from):
139
Page(to):
148
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775021 [1566775027]
Language:
English
Call no.:
E23400/3-2
Type:
Conference Proceedings

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