Blank Cover Image

Failure analysis of MEMS RF cantilevered beam switch

Author(s):
Guo, F. ( East China Normal Univ. (China) and Shanghai Institute of Technical Physics, CAS (China) )
Xu, X. ( East China Normal Univ. (China) )
Li, C. ( East China Normal Univ. (China) )
Ge, Y. ( East China Normal Univ. (China) )
Yu, J. ( East China Normal Univ. (China) )
Xin, P. ( East China Normal Univ. (China) )
Zhu, R. ( East China Normal Univ. (China) )
Lai, Z. ( East China Normal Univ. (China) )
Zhu, Z. ( East China Normal Univ. (China) )
Lu, W. ( Shanghai Institute of Technical Physics. CAS (China) )
5 more
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. Year:
2004
Page(from):
506
Page(to):
509
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

Similar Items:

Jia,M., Guo,F., Zhu,Z., Lai,Z., Chu,J., Wang,Y., Ge,X., Yang,Y.

SPIE-The International Society for Optical Engineering

Webster, J.R., Dyck, C.W., Friedmann, T.A., Sullivan, J.P., Nordquist, C.D., Carton, A.J., Kraus, G.M., Schmidt, G.D.

SPIE - The International Society of Optical Engineering

Song, Ming Xin, Zheng, Guo Xu, Wu, Rui

Trans Tech Publications

H. San, L. Zhan, P. Xu, G. Li, X. Chen

Society of Photo-optical Instrumentation Engineers

Guo,F., Lai,Z., Zhu,Z., Fan,Z., Long,Y., Yang,G., Ge,X., Chen,S., Xie,J.

SPIE-The International Society for Optical Engineering

G. Li, L. Zhan, H. San, P. Xu, X. Chen

Society of Photo-optical Instrumentation Engineers

Li, W., Shi, Y., Qing, J., Jiang, L., Ren, Z., Xin, P., Zhu, Z., Lai, Z.

SPIE - The International Society of Optical Engineering

L. Zhan, H. San, G. Li, P. Xu, X. Chen

Society of Photo-optical Instrumentation Engineers

Xu, X., Guo, F., Lu, W., Yu, S., Ge, Y., Li, N.

SPIE - The International Society of Optical Engineering

Jiang, L., Shi, Y., Li, W., Ding, Y., Lai, Z., Zhu, Z.

SPIE - The International Society of Optical Engineering

Walraven,J.A., Cole Jr.,E.I., Sloan,L.R., Hietala,S.L., Tigges,C.P., Dyck,C.W.

SPIE-The International Society for Optical Engineering

Guo, F., Li, N, Yu, S, Lin, J, Hou, Y, Xiong, D, He, Y., Zeng, H., Xu, X., Zhu, Z, Lu, W, Huang, Q, Zhou, J

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12