Liu, Z. ; He, Q. ; Xiao, P. ; Tang, J. ; He, N. ; Lu, Z.
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Microfluidics, bioMEMS, and medical microsystems : 27-29 January 2003, San Jose, California, USA. pp.138-143, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Xiao, P. ; He, N. ; Liu, Z. ; He, Q. ; Xu, J ; Lu, Z.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.401-405, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Liu, Z. ; He, Q ; Xiao, P. ; He, N. ; Lu, Z. ; Bo, L.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.412-416, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and Microfabrication Process Technology and Devices. pp.406-411, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
He, Q. ; Liu, Z. ; Tang, J. ; Nie, L. ; Xiang, H. ; Chen, H. ; Xiao, P. ; He, N.
Pub. info.:
Reliability, Testing, and Characterization of MEMS/MOEMS III. pp.302-309, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering