1.

Conference Proceedings

Conference Proceedings
Liu, Z. ; He, Q. ; Xiao, P. ; Tang, J. ; He, N. ; Lu, Z.
Pub. info.: Microfluidics, bioMEMS, and medical microsystems : 27-29 January 2003, San Jose, California, USA.  pp.138-143,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4982
2.

Conference Proceedings

Conference Proceedings
Xiao, P. ; He, N. ; Liu, Z. ; He, Q. ; Xu, J ; Lu, Z.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.401-405,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
3.

Conference Proceedings

Conference Proceedings
Liu, Z. ; He, Q ; Xiao, P. ; He, N. ; Lu, Z. ; Bo, L.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.412-416,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
4.

Conference Proceedings

Conference Proceedings
He, Q, ; Liu, Z. ; He, N. ; Xiao, P. ; Lu, Z.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.406-411,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
5.

Conference Proceedings

Conference Proceedings
He, Q. ; Liu, Z. ; Tang, J. ; Nie, L. ; Xiang, H. ; Chen, H. ; Xiao, P. ; He, N.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS III.  pp.302-309,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5343