1.

Conference Proceedings

Conference Proceedings
Buller, J.F. ; Cheek, J. ; Wristers, D.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.289-296,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
2.

Conference Proceedings

Conference Proceedings
Cheek, J. ; Buller, J. ; Wristers, D.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.275-280,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18