Stress Evolution in Integrated SrBi2Ta2O9 Ferroelectric Layers
- Author(s):
Lisoni, J. G. Wafer, K. Johnson, J. A. Goux, L. Schwitters, M. Paraschiv, V. Maes, D. Haspeslagh, L. Caputa, C. Zambrano, R. Wouters, D. J. - Publication title:
- Ferroelectric thin films XII : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 784
- Pub. Year:
- 2004
- Page(from):
- 3
- Page(to):
- 8
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997226 [1558997229]
- Language:
- English
- Call no.:
- M23500/784
- Type:
- Conference Proceedings
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