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Effect of growth parameters on refractive index and film composition of plasma enhanced chemical vapor deposition silicon oxynitride films

Author(s):
Naskar, S.
Bower, C. A.
Yadon, L. N.
Wolter, S. D.
Stoner, B. R.
Glass, J. T.
1 more
Publication title:
Solid-state chemistry of inorganic materials V : symposium held November 29-December 2, 2004, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
848
Pub. Year:
2005
Page(from):
171
Page(to):
176
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997967 [1558997962]
Language:
English
Call no.:
M23500/848
Type:
Conference Proceedings

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