1.

Conference Proceedings
Conference Proceedings
1. Ion Beam Damage Processes in GaN *
Kncheyev, S.O. ; Williams, J.S. ; Zou, J. ; Jagadish, C. ; Bradby, J.E. ; Li, G.
Pub. info.: III-Nitride Based Semiconductor Electronics and Optical Devices and thirty-fourth State-of-the-Art-Program on Compound Semiconductors (SOTAPOCS XXXIV) : proceedings of the International Symposia.  pp.150-160,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-1
2.

Conference Proceedings
Conference Proceedings
2. Low Energy Ion Irradiation of Silicon: Compound Formation and Segregation of Impurities
Petravic, M. ; Williams, J.S. ; Deenapanray, P.N.K.
Pub. info.: Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium.  pp.147-155,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-7
3.

Conference Proceedings
Conference Proceedings
3. MeV ION BEAM APPLICATIONS IN III-V SEMICONDUCTORS
Elliman, R.G. ; Ridgway, M.C. ; Johnson, S.T. ; Williams, J.S.
Pub. info.: Long-wavelength semiconductor devices, materials, and processes : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A..  pp.291-304,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 216
4.

Conference Proceedings
Conference Proceedings
4. AMORPHOUS TO CRYSTALLINE PHASE TRANSFORMATIONS IN HIGH DOSE ION IMPLANTED SILICON
Williams, J.S. ; Thornton, R.P. ; Elliman, R.G. ; Li, Y.H. ; Pogany, A.P.
Pub. info.: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.629-634,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 157
5.

Conference Proceedings
Conference Proceedings
5. CHANNELING CONTRAST MICROSCOPY: A POWERFUL TOOL FOR EXAMINING SEMICONDUCTOR STRUCTURES
McCallum, J.C. ; Brown, R.A. ; Nygren, J.S. ; Williams, J.S. ; Olson, G.L.
Pub. info.: Materials characterization : symposium held April 15-17, 1986, Palo Alto California, U.S.A..  pp.305-310,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 69
6.

Conference Proceedings
Conference Proceedings
6. *KINETICS, MICROSTRUCTURE AND MECHANISMS OF ION BEAM-INDUCED EPITAXIAL CRYSTALLIZATION OF SEMICONDUCTORS
Elliman, R.G. ; Williams, J.S. ; Maher, D.M. ; Brown, W.L.
Pub. info.: Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA.  pp.319-328,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 51
7.

Conference Proceedings
Conference Proceedings
7. IMPURITY DIFFUSION, CRYSTALLIZATION AND PHASE SEPARATION IN AMORPHOUS SILICON
Elliman, R.G. ; Poate, J.M. ; Williams, J.S. ; Gibson, J.M. ; Jacobson, D.C. ; Sood, D.K.
Pub. info.: Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA.  pp.389-394,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 51
8.

Conference Proceedings
Conference Proceedings
8. PHOTO-CHEMICAL CHANGES OF ALUMINIUM FILMS ON SILICON
Kellock, A.J. ; Williams, J.S. ; Nyberg, G.L. ; Liesegang, J.
Pub. info.: Adhesion in solids : symposium held April 5-7, 1988, Reno, Nevada, U.S.A..  pp.127-132,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 119
9.

Conference Proceedings
Conference Proceedings
9. PHOTON-INDUCED ADHESION AND CHEMICAL CHANGES IN ALUMINUM FILMS ON SILICON
Kellock, A.J. ; Liesegang, J. ; Nyberg, G.L. ; Williams, J.S.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.179-188,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
10.

Conference Proceedings
Conference Proceedings
10. ION BEAM INDUCED AMORPHIZATION AND CRYSTALLIZATION PROCESSES IN SILICON AND GaAs
Elliman, R.G. ; Williams, J.S. ; Johnson, S.T. ; Nygren, E.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.471-476,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
11.

Conference Proceedings
Conference Proceedings
11. *CRYSTALLIZATION OF INDIUM IMPLANTYED AMORPHOUS SILICON
Nygren, E. ; Williams, J.S. ; Pogany, A. ; Elliman, R.G. ; Olson, G.L. ; McCallum, J.C.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.307-318,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
12.

Conference Proceedings
Conference Proceedings
12. DIFFUSION, SOLUBILITY AND SEGREGATION OF IMPLANTED Cu, Ag AND Au IN AMORPHOUS Si
Jacobson, D.C. ; Elliman, R.G. ; Gibson, J.M. ; Olson, G.L. ; Poate, J.M. ; Williams, J.S.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.327-332,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
13.

Conference Proceedings
Conference Proceedings
13. *AMORPHIZATION, CRYSTALLIZATION AND RELATED PHENOMENA IN SILICON
Williams, J.S.
Pub. info.: Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA.  pp.83-98,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 51
14.

Conference Proceedings
Conference Proceedings
14. ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF GeXSi1-X/Si HETEROSTRUCTURES
Elliman, R.G. ; Ridgway, M.C. ; Williams, J.S.
Pub. info.: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.105-112,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 157
15.

Conference Proceedings
Conference Proceedings
15. ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF NiSi2 AND CoSi2
Ridgway, M.C. ; Elliman, R.G. ; Williams, J.S.
Pub. info.: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.131-136,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 157
16.

Conference Proceedings
Conference Proceedings
16. Inteactions of Point Defects and Impurities With Open Volume Defects in Silicon
Williams, J.S. ; Ridgway, M.C. ; Conway, M.J. ; Wong-Leung, j. ; Williams, B.C. ; Petravic, M. ; Fortuna, F. ; Ruault, M.-O. ; Bernas, H.
Pub. info.: Ion beam synthesis and processing of advanced materials : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 647
17.

Conference Proceedings
Conference Proceedings
17. Pulsed laser annealing effects in high dose rate silicon implants
Williams, J.S. ; Pogany, A.P. ; Beanland, D.G. ; Chivers, D.J. ; Kenny, M.J. ; Rose, A. ; Scott, M.D.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.169-175,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1
18.

Conference Proceedings
Conference Proceedings
18. Rapid annealing of ion implanted silicon structures using a radiant light source
Harrison, H.B. ; Grigg, M. ; Short, K.T. ; Williams, J.S. ; Zylewicz, A.
Pub. info.: Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.771-776,  1982.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 4
19.

Conference Proceedings
Conference Proceedings
19. Furnace annealing of ion implanted polycrystalline silicon
Tandon, J.L. ; Harrison, H.B. ; Neoh, C.L. ; Short, K.T. ; Williams, J.S.
Pub. info.: Grain boundaries in semiconductors : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.317-323,  1982.  New York.  North-Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 5
20.

Conference Proceedings
Conference Proceedings
20. Nanoindentation of Ion Implanted and Deposited Amorphous Silicon
Williams, J.S. ; Haberl, B. ; Bradby, J.E.
Pub. info.: Surface engineering 2004 - fundamentals and applications : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A..  pp.259-264,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 843
21.

Conference Proceedings
Conference Proceedings
21. DAMAGE REMOVAL PROCESSES IN ION IMPLANTED, RAPIDLY ANNEALED GaAs
Jacobson, D.C. ; Pearton, S.J. ; Hull, R. ; Poate, J.M. ; Williams, J.S.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.361-368,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
22.

Conference Proceedings
Conference Proceedings
22. *TRANSIENT THERMAL PROCESSING OF GaAs
Pearton, S.J. ; Gibson, J.M. ; Jacobson, D.C. ; Poate, J.M. ; Williams, J.S. ; Boerma, D.O.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.351-360,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
23.

Conference Proceedings
Conference Proceedings
23. CRYSTALLIZATION AND MELTING OF AMORPHOUS SILICON ON A MICROSECOND TIME SCALE
Olson, G.L. ; Roth, J.A. ; Nygren, E. ; Pogany, A.P. ; Williams, J.S.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.109-116,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
24.

Conference Proceedings
Conference Proceedings
24. Mechanical Deformation of Crystalline Silicon During Nanoindentation
Bradby, J.E. ; Williams, J.S. ; Wong-Leung, J. ; Swain, M.V. ; Munroe, P.
Pub. info.: Fundamentals of nanoindentation and nanotribology II : symposium held November 28-30, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Penn..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 649
25.

Conference Proceedings
Conference Proceedings
25. Implant Isolation of ZnO Epitaxial Layers
Kucheyev, S.O. ; Jagadish, C. ; Williams, J.S. ; Deenapanray, P.N.K. ; Yano, Mitsuaki ; Koike, Kazuto ; Sasa, Shigehiko ; Inoue, Masataka ; Ogata, Ken-ichi
Pub. info.: Progress in semiconductors II : electronic and optoelectronic applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A..  pp.99-104,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 744
26.

Conference Proceedings
Conference Proceedings
26. In Situ Electrical Characterization of Si During Nanoindentation
Bradby, J.E. ; Williams, J.S. ; Swain, M.V.
Pub. info.: Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A..  pp.107-112,  2003.  Warrendale, Penn.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 750
27.

Conference Proceedings
Conference Proceedings
27. Mechanical Properties of As-Grown and Ion-Beam-Modified GaN Films
Kucheyev, S.O. ; Bradby, J.E. ; Williams, J.S. ; Swain, M.V. ; Toth, M. ; Phillips, M.R. ; Jagadish, C.
Pub. info.: Fundamentals of nanoindentation and nanotribology II : symposium held November 28-30, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Penn..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 649
28.

Conference Proceedings
Conference Proceedings
28. Ion implantation processing of GaN epitaxial layers
Tan, H.H. ; Williams, J.S. ; Zou, J. ; Cockayne, D.J.H. ; Pearton, S.J. ; Yuan, C.
Pub. info.: Proceedings of the First Symposium on III-V Nitride Materials and Processes.  pp.142-148,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-11
29.

Conference Proceedings
Conference Proceedings
29. Surface Disordering And Nitrogen Loss In GaN Under Ion Bombardment
Kucheyev, S.O. ; Williams, J.S. ; Jagadish, C. ; Zou, J. ; Toth, M. ; Phillips, M.R. ; Tan, H.H. ; Li, G. ; Pearton, S.J.
Pub. info.: Wide-bandgap electronic devices.  pp.T7.9-,  2001.  Warrendale, PA..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 622
30.

Conference Proceedings
Conference Proceedings
30. Transient and furnace annealing of ion implanted gallium arsenide
Williams, J.S. ; Harrison, H.B.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.209-222,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1
31.

Conference Proceedings
Conference Proceedings
31. Metalorganic Molecular Beam Epitaxy of III-Nitrides
Abernathy, C.R. ; MacKenzie, J.D. ; Shul, R.I. ; Howard, A. ; Williams, J.S.
Pub. info.: Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII).  pp.1-9,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-21