*SYNTHESIS OF BURIED SILICON COMPOUNDS USING ION IMPLANTATION
- Author(s):
- Publication title:
- Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 107
- Pub. Year:
- 1988
- Page(from):
- 3
- Page(to):
- 16
- Pages:
- 14
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837753 [0931837758]
- Language:
- English
- Call no.:
- M23500/107
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
9
Conference Proceedings
ION-BEAM-INDUCED DESTRUCTION OF SUPERCONDUCTING PHASE COHERENCE IN YBa2Cu3O7-δ
Materials Research Society |
4
Conference Proceedings
COMPARISON OF CONDUCTIVITY PRODUCED IN POLYMERS AND CARBON FILMS BY PYROLYSIS AND HIGH ENERGY ION IRRADIATION
North-Holland |
Materials Research Society |
Materials Research Society |
11
Conference Proceedings
Microstructure and Size Distribution of Compound Semiconductor Nanocrystals Synthesized by Ion Implantation
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |