1.

Conference Proceedings
Conference Proceedings
1. Contact hole application for lithography process development using the Opti-Probe three-dimensional RT/CD technology
Jiang, Z. ; Sorkhabi, O. ; Chu, H. ; Cao, X.L. ; Li, G. ; Wen, Y. ; Opsal, J.L. ; Chang, Y.-C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.1364-1373,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
2.

Conference Proceedings
Conference Proceedings
2. Contact hole inspection by real-time optical CD metrology
Opsal, J.L. ; Chu, H. ; Wen, Y. ; Li, G. ; Chang, Y.-C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.597-607,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
3.

Conference Proceedings
Conference Proceedings
3. Characterization of gratings by Mueller polarimetry in conical diffraction
Sorkhabi, O. ; Pois, H. ; Chu, H. ; Wen, Y. ; Opsol, J. ; Kim, W. D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.217-228,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752
4.

Conference Proceedings
Conference Proceedings
4. Fundamental solutions for real-time optical CD metrology
Opsai, J.L. ; Chu, H. ; Wen, Y. ; Chang, Y.C. ; Li, G.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.163-176,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689