Chen, L. C. ; Wu, C. T. ; Wen, C-Y. ; Wu, J-J. ; Liu, W. T. ; Liu, C. W.
Pub. info.:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.219-, 2000. Warrendale, PA. MRS-Materials Research Society
Wen, C-Y. ; Wu, J-J. ; Lo, H. J. ; Chen, L. C. ; Chen, K. H. ; Lin, S. T. ; Yu, Y-C. ; Wang, C-W. ; Lin, E-K.
Pub. info.:
Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.115-, 2000. Warrendale. MRS-Materials Research Society