1.

Conference Proceedings
Conference Proceedings
1. Structural, optical and electrical characteristics of silicon carbon nitride
Chen, L. C. ; Wu, C. T. ; Wen, C-Y. ; Wu, J-J. ; Liu, W. T. ; Liu, C. W.
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.219-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592
2.

Conference Proceedings
Conference Proceedings
2. Methylamine growth of SiCN films using ECR-CVD
Wen, C-Y. ; Wu, J-J. ; Lo, H. J. ; Chen, L. C. ; Chen, K. H. ; Lin, S. T. ; Yu, Y-C. ; Wang, C-W. ; Lin, E-K.
Pub. info.: Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.115-,  2000.  Warrendale.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 606