1.

Conference Proceedings
Conference Proceedings
1. Design of LIGA beamline using a multilayer-coated reflection mirror
Kinoshita, H. ; Kimpara, Y. ; Uruga, T. ; Watanabe, T. ; Niibe, M. ; Platonov, Y. ; Wood, J.L.
Pub. info.: Advances in mirror technology for synchrotron x-ray and laser applications : 20 July 1998, San Diego, California.  pp.2-11,  1998.  Bellingham, Wash., USA.  SPIE
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3447
2.

Conference Proceedings
Conference Proceedings
2. THE BASIC PERFORMANCE OF LARGE SCALE MCFC
Izaki, Y. ; Mugikura, Y. ; Koda, E. ; Watanabe, T. ; Kinoshita, H. ; Abe, T. ; Matsuyama, T. ; Shimizu, T. ; Sato, S.
Pub. info.: Proceedings of the Third International Symposium on Carbonate Fuel Cell Technology.  pp.119-130,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-3
3.

Conference Proceedings
Conference Proceedings
3. Pattern inspection of EUV mask using an EUV microscope
Watanabe, T. ; Haga, T. ; Shoki, T. ; Hamamoto, K. ; Takada, S. ; Kazui, N. ; Kakunai, S. ; Tsubakino, H. ; Kinoshita, H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.1005-1013,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
4.

Conference Proceedings
Conference Proceedings
4. Fine pattern replication on 10×10-mm exposure area using ETS-1 laboratory tool in HIT
Hamamoto, K. ; Watanabe, T. ; Hada, H. ; Komano, H. ; Kishimura, S. ; Okazaki, S. ; Kinoshita, H.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.664-671,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
5.

Conference Proceedings
Conference Proceedings
5. Evaluation of resist outgassing by EUV irradiation
Hada, H. ; Watanabe, T. ; Hamamoto, K. ; Kinoshita, H. ; Komano, H.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.686-694,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374