19th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.98-106, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Garcia, H.I. ; Volk, W.W. ; Xiong, Y. ; Watson, S.G. ; Yu, Z. ; Guo, Z. ; Wang, L.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVII. 1 pp.81-92, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Garcia, H.I. ; Volk, W.W. ; Xiong, Y. ; Watson, S.G. ; Yu, Z. ; Guo, Z. ; Wang, L.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.935-946, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering