1.

Conference Proceedings

Conference Proceedings
Rudzinski, M.W. ; Garcia, H.I. ; Volk, W.W. ; Wang, L.
Pub. info.: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.98-106,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5148
2.

Conference Proceedings

Conference Proceedings
Garcia, H.I. ; Volk, W.W. ; Xiong, Y. ; Watson, S.G. ; Yu, Z. ; Guo, Z. ; Wang, L.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.81-92,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
3.

Conference Proceedings

Conference Proceedings
Garcia, H.I. ; Volk, W.W. ; Xiong, Y. ; Watson, S.G. ; Yu, Z. ; Guo, Z. ; Wang, L.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.935-946,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889