Neureuther, A.R. ; McIntyre, G.R. ; Gennari, F.E. ; Lam, M. ; Cain, J.P. ; Robins, G.C. ; Huang, E. ; Choi, J. ; Wang, L. ; Yuan, L. ; Oshima, H.
Pub. info.:
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA. pp.76-84, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering