1.

Conference Proceedings
Conference Proceedings
1. Nanoscale deformation measurements to improve reliability assessment of sensors and MEMS [6179-19]
Michel, B. ; Keller, J. ; Walter, H.
Pub. info.: Advanced sensor technologies for nondestructive evaluation and structural health monitoring II : 1-2 March 2006, San Diego, California, USA.  pp.61790J-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6179
2.

Conference Proceedings
Conference Proceedings
2. Design methodology of microstructures for enhanced mechanical reliability [5852-51]
Wittler, O. ; Walter, H. ; Vogel, D. ; Keller, J. ; Michel, B.
Pub. info.: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics.  pp.316-320,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5852