Preparation and Characterization of Thin Cubic Boron Nitride Films

Author(s):

• Bewilogua, K.
• Schutze, A.
• Walter, H.
• Kouptsidis, S.

Publication title:

Proceedings of the Second Symposium on III-V Nitride Materials and Processes

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

97-34

Pub. Year:

1997

Page(from):

134

Page(to):

141

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771870 [1566771870]

Language:

English

Call no.:

E23400/97-34

Type:

Conference Proceedings