Trauwaert, M.-A. ; Vanhellemont, J. ; Simoen, E. ; Claeys, C. ; Johlander, B. ; Harboe-Sorensen, R. ; Adams, L. ; Clauws, P.
Pub. info.:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.93-98, 1993. Pittsburgh, Pa.. Materials Research Society
Vanhellemont, J. ; Simoen, E. ; Bosman, G. ; Claeys, C. ; Kaniava, A. ; Gaubas, E. ; Blondeel, A. ; Clauws, P.
Pub. info.:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.670-683, 1994. Pennington, NJ. Electrochemical Society
Kissinger, G. ; Vanhellemont, J. ; Graef, D. ; Zulehner, W. ; Claeys, C. ; Richter, H.
Pub. info.:
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.156-164, 1995. Pennington, NJ. Electrochemical Society
Libezny, M. ; Kaniava, A. ; Kissinger, G. ; Nijs, J. ; Claeys, C. ; Vanhellemont, J.
Pub. info.:
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.165-172, 1995. Pennington, NJ. Electrochemical Society
Ohyama, H. ; Simoen, E. ; Claeys, C. ; Vanhellemont, J. ; Takami, Y. ; Hayama, T. ; Sunaga, H. ; Kobayashi, K.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.143-152, 1997. Pennington, NJ. Electrochemical Society
Simoen, E. ; Vanhellemont, J. ; Kaniava, A. ; Claeys, C.
Pub. info.:
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.72-81, 1994. Pennington, NJ. Electrochemical Society
Vanhellemont, J. ; Kaniava, A. ; Libezny, M. ; Simoen, E. ; Kissinger, G. ; Gaubas, E. ; Claeys, C. ; Clauws, P.
Pub. info.:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.35-, 1995. Pittsburgh, PA. MRS - Materials Research Society